cryopump 1

rzeczownikdomena: artefakt
EnWordnet [ver.5.0]
AngielskiAngielski
Definicja

a vacuum pump that traps gases and vapours by condensing them on a cold surface.

  • 1.Most production equipment utilizing a cryopump have a means to isolate the cryopump from the vacuum chamber so regeneration takes place without exposing the vacuum system to released gasses such as water vapor.

Projekt współfinansowany ze środków europejskich

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