cryopump 1

rzeczownikdomena: artefakt
EnWordnet [ver.5.0]
AngielskiAngielski
Definicja

a vacuum pump that traps gases and vapours by condensing them on a cold surface.

  • 1.Most production equipment utilizing a cryopump have a means to isolate the cryopump from the vacuum chamber so regeneration takes place without exposing the vacuum system to released gasses such as water vapor.
  • a vacuum pump that traps gases and vapours by condensing them on a cold surface.

FENG